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Specifications |
| Diameter |
f40.0mm, f50.8mm, f76.2mm , f101.6mm |
| Thickness |
0.2~1.0mm |
| Orientation |
X, Y, Z, 127.86º, 64º, 135º |
| Ref. flat orientation |
X or Y |
| Ref. Flat width |
16±2mm, 18±2mm, 22±2mm, 32±2mm |
| Front polish |
0.016 ~0.001μm |
| Back lapping |
0.3 ~10 |
| Flatness |
<5μm |
| Bow |
10μm for dia <18mm,
10μm for dia 22 ~ 32mm |
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LiTaO3 SAW Wafer
Specifications |
| Diameter |
f40mm ~ f102mm |
| Thickness |
0.2~1.2mm |
| Orientation |
X, Z, 36º, 42º, 128º |
| Ref. flat orientation |
X or Y |
| Ref. Flat width |
16±2mm, 18±2mm, 22±2mm, 32±2mm |
| Front polish |
0.016 ~0.001μm |
| Back lapping |
0.3 ~10 |
| Flatness |
<10μm for f40 ~ 65mm
<15μm for f65 ~ 102mm |
| Bow |
<20μm for f40~ 65 mm,
<40μm for f65 ~102mm |
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